Abstract—In this work, aluminum doped ZnO (AZO) thin films doped with different aluminum concentration (0%, 1%, 2%, 3%, 4%, 5%) were grown onto glass substrates by ultrasonic spray pyrolysis technique. Spectroscopic ellipsometeric studies of the AZO thin films were determined by means of spectroscopic ellipsometry and Cauchy-Urbach dispersion model were used to determined extract the thickness and the optical constants (refractive index and extinction coefficient) of AZO thin films. The transmittance, absorbance and reflectance spectra of the films were investigated by using UV-vis Spectrophotometer. The optical band gap of all the films were determined by the measurement of the optical absorbance as a function of wavelength and found to be between 3.22-3.27 eV. Also, surface image and roughness values and electrical resistivity values of AZO thin films were investigated at room temperature by using atomic force microscopy and four-point probe set-up, respectively. According to results, due to good optical, electrical and surface properties of AZO thin films, these films are promising candidates for their use as transparent electrodes in solar cells application.
Index Terms—ZnO thin film, solar cell, spectroscopic ellipsometry, sprays pyrolysis.
O. Gençyılmaz is with the Department of Physics, University of Çankırı Karatekin, Çankırı, Turkey (e-mail: eren_o@hotmail.com).
F. Atay and I. Akyüz are with Eskişehir Osmangazi University, Eskişehir, Tukey.
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Cite:O. Gençyılmaz, F. Atay, and I. Akyüz, "Deposition and Ellipsometric Characterization of Transparent Conductive Al-doped ZnO for Solar Cell Application," Journal of Clean Energy Technologies vol. 4, no. 2, pp. 90-94, 2016.
